DocumentCode

2453632

Title

Low constant flying height on silicon planar heads

Author

Dominiak-Leti, M. ; Fedeli, J.M. ; Lazzari, J.P.

Author_Institution

commissariat a I´Energie Atomique

fYear

1992

fDate

13-16 April 1992

Firstpage

318

Lastpage

318

Keywords

Assembly; Design optimization; Drives; Etching; Geometry; Microelectronics; Rails; Shape; Silicon; Stability;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 1992. Digests of Intermag '92., International

Conference_Location

St. Louis, MO, USA

Print_ISBN

0-7803-0637-6

Type

conf

DOI

10.1109/INTMAG.1992.696501

Filename

696501