Title :
Tensioned or Flexured SAW Accelerometers
Author :
Hartemann, P. ; Meunier, P.-L.
fDate :
Oct. 31 1983-Nov. 2 1983
Keywords :
Acceleration; Accelerometers; Acoustic beams; Oscillators; Resonance; Resonant frequency; Sensor phenomena and characterization; Stress; Surface acoustic waves; Temperature sensors;
Conference_Titel :
1983 Ultrasonics Symposium
Conference_Location :
Atlanta, GA, USA
DOI :
10.1109/ULTSYM.1983.198061
