DocumentCode :
2453923
Title :
Zero Temperature Coefficient SAW Delay Line on AlN Epitaxial Films
Author :
Tsubouchi, K. ; Mikoshiba, N.
fYear :
1983
fDate :
Oct. 31 1983-Nov. 2 1983
Firstpage :
299
Lastpage :
310
Keywords :
Chemicals; Delay lines; Epitaxial growth; Radio frequency; Semiconductor films; Silicon; Substrates; Surface acoustic waves; Temperature; Thin film devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1983 Ultrasonics Symposium
Conference_Location :
Atlanta, GA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1983.198063
Filename :
1535003
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2453923
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