DocumentCode :
2453951
Title :
Stress Relaxation in Triode Sputtered Zinc Oxide Films
Author :
Hickernell, F.S. ; Hickernell, F.S.
fYear :
1983
fDate :
Oct. 31 1983-Nov. 2 1983
Firstpage :
311
Lastpage :
315
Keywords :
Internal stresses; Optical devices; Optical films; Optical refraction; Optical surface waves; Optical variables control; Substrates; Temperature; Thermal stresses; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
1983 Ultrasonics Symposium
Conference_Location :
Atlanta, GA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1983.198064
Filename :
1535004
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2453951
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