Title :
Propagation and Electromechanical Coupling to Plate Modes in Piezoelectric Composite Membranes
Author :
Nassar, A.A. ; Adler, E.L.
fDate :
Oct. 31 1983-Nov. 2 1983
Keywords :
Biomembranes; Etching; Gallium arsenide; Metallization; Nonhomogeneous media; Piezoelectric films; Semiconductor films; Silicon; Surface waves; Zinc oxide;
Conference_Titel :
1983 Ultrasonics Symposium
Conference_Location :
Atlanta, GA, USA
DOI :
10.1109/ULTSYM.1983.198077