Title :
Low Temperature Coefficient Shear Wave Thin Films for Composite Resonators and Filters
Author :
Wang, J.S. ; Landin, A.R. ; Lakin, M.M.
fDate :
Oct. 31 1983-Nov. 2 1983
Keywords :
Biomembranes; Piezoelectric films; Resonance; Resonator filters; Semiconductor films; Sputtering; Substrates; Temperature sensors; Transistors; Zinc oxide;
Conference_Titel :
1983 Ultrasonics Symposium
Conference_Location :
Atlanta, GA, USA
DOI :
10.1109/ULTSYM.1983.198102