DocumentCode
2454590
Title
Low Temperature Coefficient Shear Wave Thin Films for Composite Resonators and Filters
Author
Wang, J.S. ; Landin, A.R. ; Lakin, M.M.
fYear
1983
fDate
Oct. 31 1983-Nov. 2 1983
Firstpage
491
Lastpage
494
Keywords
Biomembranes; Piezoelectric films; Resonance; Resonator filters; Semiconductor films; Sputtering; Substrates; Temperature sensors; Transistors; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1983 Ultrasonics Symposium
Conference_Location
Atlanta, GA, USA
Type
conf
DOI
10.1109/ULTSYM.1983.198102
Filename
1535042
Link To Document