Effect of Mesa-Shaping on Spurious Modes in ZnO/Si Bulk-Wave Composite Resonators

Author

Milsom, R.F. ; Curran, J.E. ; Murray, S.L. ; Terry-Wood, S. ; Redwood, M.

fYear

1983

fDate

Oct. 31 1983-Nov. 2 1983

Firstpage

498

Lastpage

503

Keywords

Admittance; Biomembranes; Electrodes; Frequency; Piezoelectric films; Predictive models; Semiconductor films; Silicon; Tellurium; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

1983 Ultrasonics Symposium

Conference_Location

Atlanta, GA, USA

Type

DOI

10.1109/ULTSYM.1983.198104

Filename

1535044

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