Title :
Photoacoustic Measurements of Nonradiative Lifetime and Defect in Silicon Wafers
Author :
Mikoshiba, N. ; Nakamura, H. ; Tsubouchi, K.
fDate :
Oct. 31 1983-Nov. 2 1983
Keywords :
Microscopy; Optical surface waves; Oxidation; Radiative recombination; Silicon; Stacking; Surface topography; Temperature; Transducers; Zinc oxide;
Conference_Titel :
1983 Ultrasonics Symposium
Conference_Location :
Atlanta, GA, USA
DOI :
10.1109/ULTSYM.1983.198145
