DocumentCode
2457045
Title
Advances in precise positioning using the electrostatic glass motor
Author
Moser, R. ; Sache, L. ; Cassat, A. ; Bleuler, H. ; Higuchi, T.
Author_Institution
Lab. of Robotics, Ecole Polytechnique Federale de Lausanne, Switzerland
Volume
3
fYear
2003
fDate
12-16 Oct. 2003
Firstpage
1684
Abstract
This paper reports the continuation of the authors work in the field of linear and rotary sub-micrometric positioning using electrostatic glass motors. Electrostatic glass motors, a development where a glass rotor, once polarized using a static electrostatic field, is synchronously following a moving electrostatic field, have been described previously. The potential application to precise positioning was proven feasible and promising. The present report describes a fully operational rotary prototype, featuring remarkable performances. It is shown that sub arc-second positioning is possible in open loop operation, over an infinite operation range and over a very broad speed range. After a brief recapitulation of the propulsion principle, the realized system is presented and characterized, its performance experimentally determined and discussed.
Keywords
electrostatic motors; glass; machine control; polarisation; position control; rotors; electrostatic glass motor; electrostatic induction; infinite operation range; linear nanometric positioning; linear sub-micrometric positioning; moving electrostatic field; open loop operation; polarised glass rotor; precise positioning; propulsion principle; rotary sub-micrometric positioning; static electrostatic field; sub arc-second positioning; Driver circuits; Electrodes; Electrostatic actuators; Glass; Propulsion; Robots; Rotors; Stators; Synchronous motors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Industry Applications Conference, 2003. 38th IAS Annual Meeting. Conference Record of the
Print_ISBN
0-7803-7883-0
Type
conf
DOI
10.1109/IAS.2003.1257782
Filename
1257782
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