• DocumentCode
    2457045
  • Title

    Advances in precise positioning using the electrostatic glass motor

  • Author

    Moser, R. ; Sache, L. ; Cassat, A. ; Bleuler, H. ; Higuchi, T.

  • Author_Institution
    Lab. of Robotics, Ecole Polytechnique Federale de Lausanne, Switzerland
  • Volume
    3
  • fYear
    2003
  • fDate
    12-16 Oct. 2003
  • Firstpage
    1684
  • Abstract
    This paper reports the continuation of the authors work in the field of linear and rotary sub-micrometric positioning using electrostatic glass motors. Electrostatic glass motors, a development where a glass rotor, once polarized using a static electrostatic field, is synchronously following a moving electrostatic field, have been described previously. The potential application to precise positioning was proven feasible and promising. The present report describes a fully operational rotary prototype, featuring remarkable performances. It is shown that sub arc-second positioning is possible in open loop operation, over an infinite operation range and over a very broad speed range. After a brief recapitulation of the propulsion principle, the realized system is presented and characterized, its performance experimentally determined and discussed.
  • Keywords
    electrostatic motors; glass; machine control; polarisation; position control; rotors; electrostatic glass motor; electrostatic induction; infinite operation range; linear nanometric positioning; linear sub-micrometric positioning; moving electrostatic field; open loop operation; polarised glass rotor; precise positioning; propulsion principle; rotary sub-micrometric positioning; static electrostatic field; sub arc-second positioning; Driver circuits; Electrodes; Electrostatic actuators; Glass; Propulsion; Robots; Rotors; Stators; Synchronous motors; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Industry Applications Conference, 2003. 38th IAS Annual Meeting. Conference Record of the
  • Print_ISBN
    0-7803-7883-0
  • Type

    conf

  • DOI
    10.1109/IAS.2003.1257782
  • Filename
    1257782