DocumentCode
2457768
Title
Vapor Sensing by Means of a ZnO-on-Si Surface Acoustic Wave Resonator
Author
Martin, S.J. ; Schweizer, K.S. ; Schwartz, S.S. ; Gunshor, R.L.
fYear
1984
fDate
14-16 Nov. 1984
Firstpage
207
Lastpage
212
Keywords
Acoustic devices; Acoustic sensors; Acoustic waves; Delay lines; Laboratories; Resonance; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1984 Ultrasonics Symposium
Conference_Location
Dallas, Texas, USA
Type
conf
DOI
10.1109/ULTSYM.1984.198291
Filename
1535231
Link To Document