Title :
Magnetic stability of Fe9.0wt%Si/permalloy multilayered films in high temperature processes
Author :
Ohji, H. ; Tanabe, S. ; Kataoka, M. ; Ozeki, T.
Author_Institution :
Mitsubishi Electric Corp.
Keywords :
Annealing; Iron; Magnetic films; Magnetic properties; Magnetostriction; Permeability; Soft magnetic materials; Sputtering; Stability; Temperature;
Conference_Titel :
Magnetics Conference, 1992. Digests of Intermag '92., International
Conference_Location :
St. Louis, MO, USA
Print_ISBN :
0-7803-0637-6
DOI :
10.1109/INTMAG.1992.696530