DocumentCode
2458303
Title
On the use of an oscillation-based test methodology for CMOS micro-electro-mechanical systems
Author
Beroulle, V. ; Bertrand, Y. ; Latorre, L. ; Nouet, P.
Author_Institution
LIRMM, Univ. of Montpellier, France
fYear
2002
fDate
2002
Firstpage
1120
Abstract
This paper introduces the use of the oscillation test technique for MEMS testing. This well-known test technique is here adapted to MEMS. Its efficiency is evaluated based on a case study: A CMOS electromechanical magnetometer.
Keywords
CMOS integrated circuits; circuit oscillations; integrated circuit testing; magnetometers; microsensors; CMOS electromechanical magnetometer; MEMS testing; oscillation test; Circuit faults; Circuit testing; Magnetic field induced strain; Magnetic sensors; Magnetometers; Microelectromechanical systems; Micromechanical devices; Semiconductor device modeling; Structural beams; System testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Design, Automation and Test in Europe Conference and Exhibition, 2002. Proceedings
ISSN
1530-1591
Print_ISBN
0-7695-1471-5
Type
conf
DOI
10.1109/DATE.2002.998476
Filename
998476
Link To Document