Title :
Temperature Compensated High Coupling and High Quality Factor ZnO/SiO, Bulk Wave Resonators on High Resistance Substrates
Author :
Shiosaki, T. ; Fukuichi, T. ; Tokuda, M. ; Kawabata, A.
Keywords :
Electrodes; Frequency; Gallium arsenide; Piezoelectric films; Q factor; Semiconductor films; Sputter etching; Substrates; Temperature; Zinc oxide;
Conference_Titel :
IEEE 1984 Ultrasonics Symposium
Conference_Location :
Dallas, Texas, USA
DOI :
10.1109/ULTSYM.1984.198328
