Title :
Characterization of dynamics in on-wafer RF MEMS variable - capacitors using RF measurement techniques
Author :
Girbau, David ; Lázaro, Antonio ; Pradell, Lluís
Keywords :
Capacitors; Electrostatic measurements; Electrothermal effects; Frequency measurement; Measurement techniques; Micromechanical devices; Radio frequency; Radiofrequency microelectromechanical systems; Resonance; Testing;
Conference_Titel :
ARFTG Conference Digest Spring, 2004. 63rd
Print_ISBN :
0-7803-8371-0
DOI :
10.1109/ARFTG.2004.1387865
