DocumentCode
2459403
Title
Acoustic Interference Microscopes with Electrical Mixing Method for Reflection Mode
Author
Chubachi, N. ; Sannomiya, T.
fYear
1984
fDate
14-16 Nov. 1984
Firstpage
604
Lastpage
609
Keywords
Acoustic measurements; Acoustic reflection; Acoustic transducers; Interference; Microscopy; Optical reflection; Phase shifters; Surface acoustic waves; Surface topography; Velocity measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1984 Ultrasonics Symposium
Conference_Location
Dallas, Texas, USA
Type
conf
DOI
10.1109/ULTSYM.1984.198370
Filename
1535310
Link To Document