Direct-write printing of an RF-MEMS Cantilever

Author

Md Numan-Al-Mobin, A. ; Shankar, Raji ; Cross, W.M. ; Kellar, J. ; Whites, Keith ; Anagnostou, Dimitris

Author_Institution

South Dakota Sch. of Mines & Technol., Rapid City, SD, USA

fYear

2014

fDate

6-11 July 2014

Firstpage

15

Lastpage

16

Abstract

This paper presents the manufacturing of a simple RF MEMS cantilever ohmic contact switch using only a custom made silver nanoparticulate ink and PMMA [poly(methyl methacrylate)]. The manufacturing is additive in nature and only the PMMA layer is subtractive. The MEMS switch is printed on Kapton substrate using an Optomec Aerosol Jet printer. Then, it is cured at 200°C. Finally it is soaked in chloroform to remove the PMMA layer and complete the process. The printed MEMS were tested successfully and results are presented here.

Keywords

aerosols; cantilevers; curing; ink; ink jet printing; microswitches; nanostructured materials; ohmic contacts; polymers; production testing; rapid prototyping (industrial); silver; three-dimensional printing; Ag; Kapton substrate; PMMA layer; additive; additive manufacturing; chloroform; curing; custom made silver nanoparticulate ink; direct-write printing; optomec aerosol jet printer; poly(methyl methacrylate); production testing; simple printed RF MEMS cantilever ohmic contact switch; temperature 200 degC; Electrodes; Ink; Micromechanical devices; Printing; Radio frequency; Silver; Switches; Direct-Write; Flexible Electronics; RF MEMS;

fLanguage

English

Publisher

ieee

Conference_Titel

Antennas and Propagation Society International Symposium (APSURSI), 2014 IEEE

Conference_Location

Memphis, TN

ISSN

1522-3965

Print_ISBN

978-1-4799-3538-3

Type

conf

DOI

10.1109/APS.2014.6904339

Filename

6904339