DocumentCode
2459446
Title
Thin- and Thick-Film Material Characterization Using Wideband Reflection Acoustic Microscopy
Author
Lee, C.C. ; Chang, Xiaolin ; Tsai, C.S.
fYear
1984
fDate
14-16 Nov. 1984
Firstpage
618
Lastpage
621
Keywords
Acoustic materials; Acoustic measurements; Acoustic reflection; Frequency measurement; Microscopy; Optical films; Optical reflection; Resonant frequency; Substrates; Wideband;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1984 Ultrasonics Symposium
Conference_Location
Dallas, Texas, USA
Type
conf
DOI
10.1109/ULTSYM.1984.198373
Filename
1535313
Link To Document