2002 14th International Conference on Ion Implantation Technology Proceedings (IEEE Cat. No.02EX505)

fYear

2002

fDate

27-27 Sept. 2002

Keywords

ion implantation; semiconductor doping; information technology; ion implantation technology; materials modification; semiconductor doping processes;

fLanguage

English

Publisher

ieee

Conference_Titel

Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on

Conference_Location

Taos, New Mexico, USA

Print_ISBN

0-7803-7155-0

Type

conf

DOI

10.1109/IIT.2002.1257923

Filename

1257923

Link To Document