DocumentCode
2460455
Title
The influence of Young´s modulus on roundness in silicon sphere fabrication
Author
Collins, J.G. ; Giardini, W.J. ; Leistner, A.J. ; Kenny, M.J.
Author_Institution
Div. of Appl. Phys., CSIRO, Lindfield, NSW, Australia
fYear
1996
fDate
17-21 June 1996
Firstpage
466
Lastpage
467
Abstract
Silicon single crystal spheres for use in accurate determination of the Avogadro constant are fabricated by optical grinding and polishing. Surface profiling of the deviation from sphericity of the spheres shows a strong cubic symmetry on the scale of 20-40 nm, which is well correlated with the orientation of the silicon crystal axes. This deviation from sphericity can be explained in terms of the variation of Young´s modulus with crystal orientation.
Keywords
Young´s modulus; constants; elemental semiconductors; grinding; measurement errors; measurement standards; polishing; silicon; 20 to 40 nm; Avogadro constant; Si; Young´s modulus; crystal axes; crystal orientation; cubic symmetry; optical grinding; optical polishing; roundness; single crystal spheres; sphere fabrication; surface profiling; Abrasives; Aluminum oxide; Finishing; Optical device fabrication; Optical distortion; Shape; Silicon carbide; Surface cracks; Surface texture; Surface treatment;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements Digest, 1996 Conference on
Conference_Location
Braunschweig, Germany
Print_ISBN
0-7803-3376-4
Type
conf
DOI
10.1109/CPEM.1996.547168
Filename
547168
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