Title :
The influence of Young´s modulus on roundness in silicon sphere fabrication
Author :
Collins, J.G. ; Giardini, W.J. ; Leistner, A.J. ; Kenny, M.J.
Author_Institution :
Div. of Appl. Phys., CSIRO, Lindfield, NSW, Australia
Abstract :
Silicon single crystal spheres for use in accurate determination of the Avogadro constant are fabricated by optical grinding and polishing. Surface profiling of the deviation from sphericity of the spheres shows a strong cubic symmetry on the scale of 20-40 nm, which is well correlated with the orientation of the silicon crystal axes. This deviation from sphericity can be explained in terms of the variation of Young´s modulus with crystal orientation.
Keywords :
Young´s modulus; constants; elemental semiconductors; grinding; measurement errors; measurement standards; polishing; silicon; 20 to 40 nm; Avogadro constant; Si; Young´s modulus; crystal axes; crystal orientation; cubic symmetry; optical grinding; optical polishing; roundness; single crystal spheres; sphere fabrication; surface profiling; Abrasives; Aluminum oxide; Finishing; Optical device fabrication; Optical distortion; Shape; Silicon carbide; Surface cracks; Surface texture; Surface treatment;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 1996 Conference on
Conference_Location :
Braunschweig, Germany
Print_ISBN :
0-7803-3376-4
DOI :
10.1109/CPEM.1996.547168
