DocumentCode
2460474
Title
Scanning X-ray interferometry over a millimeter baseline
Author
Bergamin, A. ; Cavagnero, G. ; Cordiali, L. ; Mana, G. ; Zosi, G.
Author_Institution
Istituto di Metrol., CNR, Torino, Italy
fYear
1996
fDate
17-21 June 1996
Firstpage
468
Lastpage
469
Abstract
A new translation device has been developed at the IMGC to improve the measurement of the
Keywords
X-ray crystallography; electromagnetic wave interferometry; elemental semiconductors; lattice constants; physical instrumentation control; position control; servomechanisms; silicon; 2 mm; Si; crystal position; lattice spacing; linear displacement; maximum crystal movement; millimeter baseline; nanoradian resolutions; scanning X-ray interferometry; servo controls; translation device; Attitude control; Crystals; Fasteners; Finite element methods; Lattices; Machining; Millimeter wave devices; Optical interferometry; Servosystems; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements Digest, 1996 Conference on
Conference_Location
Braunschweig, Germany
Print_ISBN
0-7803-3376-4
Type
conf
DOI
10.1109/CPEM.1996.547169
Filename
547169
Link To Document