DocumentCode
2461425
Title
SAW filters using ZnO thin films
Author
Kirk, David M. ; Kuramoto, Ken
Author_Institution
Murata Erie North America, Inc., Smyrna, GA, USA
fYear
1988
fDate
9-11 May 1988
Firstpage
114
Lastpage
118
Abstract
Surface acoustic wave (SAW) filters using ZnO thin films are discussed. These films have a low dielectric constant and low temperature coefficients, but stability and producibility of the films are a concern. Some fabrication techniques for the films are described, and packaging and reliability of the filters are discussed. SAW filters with 1.5 to 2 GHz center frequency are reported
Keywords
microwave filters; passive filters; piezoelectric materials; surface acoustic wave devices; zinc compounds; 1.5 to 2 GHz; SAW filters; ZnO thin films; dielectric constant; fabrication techniques; packaging; producibility; reliability; stability; temperature coefficients; Acoustic waves; Dielectric constant; Dielectric thin films; Fabrication; SAW filters; Stability; Surface acoustic waves; Temperature; Transistors; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Components Conference, 1988., Proceedings of the 38th
Conference_Location
Los Angeles, CA
Type
conf
DOI
10.1109/ECC.1988.12580
Filename
12580
Link To Document