DocumentCode

2462047

Title

Recent Advances in Subminiature/Thin Membrane Resonators

Author

Gagnepain, J.J.

fYear

1985

fDate

16-18 Oct. 1985

Firstpage

291

Lastpage

301

Keywords

Bars; Biomembranes; Chemicals; Crystalline materials; Etching; Lithium compounds; Lithium niobate; Milling; Resonant frequency; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

IEEE 1985 Ultrasonics Symposium

Conference_Location

San Francisco, CA, USA

Type

conf

DOI

10.1109/ULTSYM.1985.198521

Filename

1535461