• DocumentCode
    2462237
  • Title

    Temperature Compensated ZnO/SiO2/Si Thin Film Resonator for VHF Voltage Controlled Oscillator

  • Author

    Miyasaka, Yoichi ; Hoshino, Shigeki ; Takahashi, Sadayuki

  • fYear
    1985
  • fDate
    16-18 Oct. 1985
  • Firstpage
    346
  • Lastpage
    351
  • Keywords
    Biomembranes; Electrodes; Resonance; Semiconductor thin films; Sputter etching; Substrates; Surface acoustic waves; Temperature; Voltage-controlled oscillators; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE 1985 Ultrasonics Symposium
  • Conference_Location
    San Francisco, CA, USA
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1985.198530
  • Filename
    1535470
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2462237