The influence of nitrogen on the erosion plasma ion component in a vacuum-arc source

A vacuum arc with a consumable titanium cathode has been investigated in a plasma source intended for coating deposition. It is found that in the presence of nitrogen the plasma ion component characteristics on the discharge axis are distinctly affected by the variation in the angular distribution of Ti⁺ ion flow intensity. The nitrogen pressure dependence of ion current entering the substrate is essentially determined by the process of metal ion charge exchange on gas molecules that tends to increase the mean energy of particles related to their charge multiplicity. In conditions under study, the arc causes atomic ions of nitrogen to produce in cathode spots on titanium nitride inclusions