Design fabrication of high-precision stage and ultrahigh-speed nanoscale positioning

Motion control techniques are employed on nanoscale positioning in precision mechanical equipment, for example, NC machine tools, exposure systems, and so on. The advanced motion control techniques are based on the precise current control. However, speed-up of the precise current response has a serious limitation because of the carrier period of an inverter. In addition, the positional response has to be slower than the current response. In this paper, an experimental precision stage was designed and fabricated. Then, a novel ultrahigh-speed nanoscale positioning was achieved based on multirate PWM control. The positional error is in 100 nm. The positioning time is 2 ms which is only 20 times as long as the carrier period.