Title :
SAW Cantilever Beam Accelerometer Sensitivities
Author :
Hauden, D. ; Bindler, F. ; Coquerel, R.
Keywords :
Acceleration; Accelerometers; Acoustic beams; Capacitive sensors; Perturbation methods; Stress; Structural beams; Surface acoustic waves; Temperature sensors; Thermal force;
Conference_Titel :
IEEE 1985 Ultrasonics Symposium
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ULTSYM.1985.198557
