DocumentCode

2463164

Title

SAW Accelerometers: Integration of Thick and Thin Film Technologies

Author

Bonbrake, Tim B. ; Erikson, Carl A., Jr. ; Thoma, Dennis

fYear

1985

fDate

16-18 Oct. 1985

Firstpage

591

Lastpage

594

Keywords

Accelerometers; Assembly; Circuits; Delay lines; Electronics packaging; Fabrication; Surface acoustic waves; Testing; Transistors; Tuning;

fLanguage

English

Publisher

ieee

Conference_Titel

IEEE 1985 Ultrasonics Symposium

Conference_Location

San Francisco, CA, USA

Type

conf

DOI

10.1109/ULTSYM.1985.198578

Filename

1535518