Improved RF integrated magnetic thin-film inductors by means of micro slits and serface planalization techniques
Author :
Yamaguchi, M. ; Baba, M. ; Suezawa, K. ; Moizumi, T. ; Arai, K.I. ; Haga, A. ; Shimada, Y. ; Tanabe, S. ; Ito, K.
Author_Institution :
Tohoku University
fYear :
2000
fDate :
9-13 April 2000
Firstpage :
464
Lastpage :
464
Keywords :
Coils; Inductance; Magnetic cores; Magnetic films; Magnetic resonance; Planarization; Radio frequency; Rough surfaces; Surface roughness; Thin film inductors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Magnetics Conference, 2000. INTERMAG 2000 Digest of Technical Papers. 2000 IEEE International
