DocumentCode
2465501
Title
Improved RF integrated magnetic thin-film inductors by means of micro slits and serface planalization techniques
Author
Yamaguchi, M. ; Baba, M. ; Suezawa, K. ; Moizumi, T. ; Arai, K.I. ; Haga, A. ; Shimada, Y. ; Tanabe, S. ; Ito, K.
Author_Institution
Tohoku University
fYear
2000
fDate
9-13 April 2000
Firstpage
464
Lastpage
464
Keywords
Coils; Inductance; Magnetic cores; Magnetic films; Magnetic resonance; Planarization; Radio frequency; Rough surfaces; Surface roughness; Thin film inductors;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2000. INTERMAG 2000 Digest of Technical Papers. 2000 IEEE International
Conference_Location
Toronto, ON, Canada
Print_ISBN
0-7803-5943-7
Type
conf
DOI
10.1109/INTMAG.2000.872239
Filename
872239
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