Title :
GHz-Range Step-Type Unidirectional Low-Loss Filters and 5GHz-Range Conventional I.D.T. Filters
Author :
Yamanouchi, K. ; Chen, Z.H. ; Meguro, T.
Keywords :
Dry etching; Electrodes; Electron beams; Fabrication; Frequency; Lithography; Resists; SAW filters; Substrates; Transducers;
Conference_Titel :
IEEE 1986 Ultrasonics Symposium
Conference_Location :
Williamsburg, VA, USA
DOI :
10.1109/ULTSYM.1986.198714
