DocumentCode :
2466281
Title :
High-current processing of microfabricated field emitters for enhanced emission uniformity and high-current-density operation
Author :
Schwoebel, P.R. ; Spindt, C.A. ; Holland, C.E.
Author_Institution :
Appl. Phys. Sci. Lab., SRI Int., Menlo Park, CA, USA
fYear :
2002
fDate :
2002
Firstpage :
65
Lastpage :
66
Abstract :
We have shown that in situ tip self-heating by the emitted electron current can be used to make the current-voltage characteristics of microfabricated field emitter tips nearly identical to one another. The resulting improved emission uniformity could make it possible to realize the full potential of field-emission cathodes to produce current densities of the order of 103-104 amps/cm2 averaged over the area occupied by an array.
Keywords :
cathodes; electron field emission; vacuum microelectronics; current density; current-voltage characteristics; emission uniformity; field emission cathode; field emitter array; high-current processing; microfabrication; tip self-heating; Annealing; Cathodes; Current density; Current-voltage characteristics; Electron emission; Laboratories; Surface cleaning; Surface contamination; Surface topography; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Electronics Conference, 2002. IVEC 2002. Third IEEE International
Print_ISBN :
0-7803-7256-5
Type :
conf
DOI :
10.1109/IVELEC.2002.999263
Filename :
999263
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2466281
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