Advancements in electrode design and laser techniques for fabricating micro-electrode arrays as part of a retinal prosthesis

Retinal micro-electrode arrays (MEAs) for a visual prosthesis were fabricated by laser structuring of platinum (Pt) foil and liquid silicone rubber. A new design was created using a folding technique to create a multi-layered array from a single Pt sheet. This method allowed a reduction in both the electrode pitch, and the overall width of the array, while maintaining coplanar connection points for more stable interconnections to other components of the system. The design also included a section which could be rolled to create a cylindrical segment in order to minimise the size of the exit in the sclera after implantation. A picosecond mode-locked 532nm laser system was investigated as a replacement for the nanosecond Q-switched 1064 nm laser currently in use. Trials showed that the ps system could produce high quality electrode tracks with a minimum pitch of 30 μm, less than 40% the pitch achievable with the ns laser. A method was investigated for the cutting of Pt foils without damaging the underlying silicone by laser machining to a depth just below the thickness of the foil. Initial samples showed promise with full penetration of the foil only occurring at cross points of the laser paths. The ps laser was also used to create roughened surfaces, in order to increase the electrochemical surface area of the electrodes. Surfaces were imaged using a scanning electron microscope, and compared to surfaces roughened with the ns laser. The ps laser was seen to offer a reduction in feature size, as well as an increase in control over the appearance of the electrode surface.