DocumentCode :
2466783
Title :
Multi-Layer ZnO Acoustic Transducers
Author :
Hadimioglu, B. ; Khuri-Yakub, B.T. ; Goddard, L.C. ; Quate, C.F.
fYear :
1986
fDate :
17-19 Nov. 1986
Firstpage :
361
Lastpage :
364
Keywords :
Acoustic transducers; Acoustic waves; Fabrication; Frequency conversion; Impedance; Piezoelectric films; Piezoelectric materials; Piezoelectric transducers; Sputtering; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE 1986 Ultrasonics Symposium
Conference_Location :
Williamsburg, VA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1986.198765
Filename :
1535705
Link To Document :
بازگشت