Title :
Multi-Layer ZnO Acoustic Transducers
Author :
Hadimioglu, B. ; Khuri-Yakub, B.T. ; Goddard, L.C. ; Quate, C.F.
Keywords :
Acoustic transducers; Acoustic waves; Fabrication; Frequency conversion; Impedance; Piezoelectric films; Piezoelectric materials; Piezoelectric transducers; Sputtering; Zinc oxide;
Conference_Titel :
IEEE 1986 Ultrasonics Symposium
Conference_Location :
Williamsburg, VA, USA
DOI :
10.1109/ULTSYM.1986.198765