DocumentCode :
2466801
Title :
Recent Advances in Monolithic Film Resonator Technology
Author :
Driscoll, M.M. ; Moore, R.A. ; Rosenbaum, J.F. ; Krischnaswamy, S.V. ; Szedon, J.R.
fYear :
1986
fDate :
17-19 Nov. 1986
Firstpage :
365
Lastpage :
370
Keywords :
Film bulk acoustic resonators; Monolithic integrated circuits; Oscillators; Piezoelectric films; Radiofrequency integrated circuits; Resonator filters; Semiconductor films; Sputtering; Substrates; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE 1986 Ultrasonics Symposium
Conference_Location :
Williamsburg, VA, USA
Type :
conf
DOI :
10.1109/ULTSYM.1986.198766
Filename :
1535706
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2466801
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