DocumentCode
2466801
Title
Recent Advances in Monolithic Film Resonator Technology
Author
Driscoll, M.M. ; Moore, R.A. ; Rosenbaum, J.F. ; Krischnaswamy, S.V. ; Szedon, J.R.
fYear
1986
fDate
17-19 Nov. 1986
Firstpage
365
Lastpage
370
Keywords
Film bulk acoustic resonators; Monolithic integrated circuits; Oscillators; Piezoelectric films; Radiofrequency integrated circuits; Resonator filters; Semiconductor films; Sputtering; Substrates; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1986 Ultrasonics Symposium
Conference_Location
Williamsburg, VA, USA
Type
conf
DOI
10.1109/ULTSYM.1986.198766
Filename
1535706
Link To Document