DocumentCode
2466832
Title
A Perturbation Calculation of the Quality Factor of the Piezoelectric Thin Film on Semiconductor Composite Resonator Due to Radiation into the Wafer
Author
Shick, D.V. ; Tiersten, H.F.
fYear
1986
fDate
17-19 Nov. 1986
Firstpage
377
Lastpage
382
Keywords
Electrodes; Equations; Near-field radiation pattern; Piezoelectric films; Q factor; Resonance; Semiconductor films; Semiconductor thin films; Stress; Strips;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1986 Ultrasonics Symposium
Conference_Location
Williamsburg, VA, USA
Type
conf
DOI
10.1109/ULTSYM.1986.198768
Filename
1535708
Link To Document