Title :
A Perturbation Calculation of the Quality Factor of the Piezoelectric Thin Film on Semiconductor Composite Resonator Due to Radiation into the Wafer
Author :
Shick, D.V. ; Tiersten, H.F.
Keywords :
Electrodes; Equations; Near-field radiation pattern; Piezoelectric films; Q factor; Resonance; Semiconductor films; Semiconductor thin films; Stress; Strips;
Conference_Titel :
IEEE 1986 Ultrasonics Symposium
Conference_Location :
Williamsburg, VA, USA
DOI :
10.1109/ULTSYM.1986.198768
