A vertically supported ring-type mems gyroscope utilizing electromagnetic actuation and sensing

In this paper, we present the design and fabrication of a ring-type MEMS gyroscope, which is composed of a soft polymer-structure and 8 separate driving and sensing coils. The bottom side of the ring structure is mounted, while the upper portion vibrated freely by the actuation of electromagnetic and inertial forces. For the prototype demonstration, a polymer molding, metal printing, and multilayer packaging process is developed. Realized by the highly flexible structure, the device is expected to greatly amplify the vibratory motion and therefore the resulting output signal. As such, the proposed device could be low cost and readily serve as a motion detector for a variety of applications.