High-Q VHF micromechanical filters using free-free beam resonators

This paper presents an innovative micromechanical bandpass filter using free-free beam resonators and torsional coupling beams for VHF applications. The rationale for adopting free-free beam resonators is that the free-free beam resonators would experience less anchor loss than a clamped-clamped resonators. ANSYS simulation shows that the proposed free-free beam filter possess less anchor loss. Finally, experimental results demonstrate that the free-free beam filter is feasible at the VHF operation.