Title :
Electronic system for control of a thermally actuated alignment device
Author :
Yang, Ruimin ; Van Schieveen, Jeroen ; Nihtianov, Stoyan ; Spronck, Jo W.
Author_Institution :
Dept. of Microelectron., Delft Univ. of Technol., Delft, Netherlands
Abstract :
This article presents the design of an electronic system that is used to control a thermally actuated alignment device. This device is ideal for aligning critical parts in complex, high-precision systems, like, for example, optical elements or the electrodes of capacitive sensors. Accurate temperature control of the thermal elements improves the performance of the alignment in terms of positioning accuracy and operating speed. Furthermore, the article presents the realized test setup and the initial measurement results. The measurement results show the benefits of the new controller.
Keywords :
capacitive sensors; electrodes; temperature control; accurate temperature control; capacitive sensors electrodes; controller; electronic system design; initial measurement results; optical elements; positioning accuracy; thermally actuated alignment device control; Actuators; Capacitive sensors; Clamps; Control systems; Cooling; Costs; Heating; Temperature control; Thermal engineering; Thermal lensing; Thermal actuation; auto-aligment; electronic control system; smart sensor; thermal stepper;
Conference_Titel :
Industrial Technology (ICIT), 2010 IEEE International Conference on
Conference_Location :
Vi a del Mar
Print_ISBN :
978-1-4244-5695-6
Electronic_ISBN :
978-1-4244-5696-3
DOI :
10.1109/ICIT.2010.5472453