DocumentCode :
2467534
Title :
Safety valve in PCB-MEMS technology for limiting pressure in microfluidic applications
Author :
Perdigones, Francisco ; Moreno, José M. ; Luque, Antonio ; Aracil, Carmen ; Quero, José M.
Author_Institution :
Dept. Electron. Eng., Univ. of Seville, Seville, Spain
fYear :
2010
fDate :
14-17 March 2010
Firstpage :
1558
Lastpage :
1561
Abstract :
A safety valve that prevents liquid from flowing through a fluidic circuit when its pressure is larger than a certain threshold is presented in this paper. The valve has been designed to be integrable in PCB fluidic systems, and its parameters can be modified easily to adapt the threshold pressure. Fabrication process uses PCB as the substrate, and the copper present as a sacrificial layer. Structural part is made of negative photoresist SU-8, which is deposited on top of copper and is released to form a suspended beam when copper is etched away. The experimental characterization of the valve is presented, showing its correct operation.
Keywords :
microfluidics; photoresists; printed circuits; safety; valves; PCB fluidic systems; PCB-MEMS technology; fluidic circuit; microfluidic applications; negative photoresist; safety valve; Bridge circuits; Copper; Costs; Fabrication; Microfluidics; Orifices; Protection; Pumps; Safety; Valves;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Industrial Technology (ICIT), 2010 IEEE International Conference on
Conference_Location :
Vi a del Mar
Print_ISBN :
978-1-4244-5695-6
Electronic_ISBN :
978-1-4244-5696-3
Type :
conf
DOI :
10.1109/ICIT.2010.5472462
Filename :
5472462
Link To Document :
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