Title :
Application of Line-Focus-Beam Acoustic Microscope to Inhomogeneity Detection on SAW Device Materials
Author :
Kushibiki, J. ; Asano, H. ; Ueda, T. ; Chubachi, N.
Keywords :
Acoustic applications; Acoustic devices; Acoustic materials; Acoustic measurements; Acoustic pulses; Acoustic signal detection; Lenses; Microscopy; Optical materials; Surface acoustic wave devices;
Conference_Titel :
IEEE 1986 Ultrasonics Symposium
Conference_Location :
Williamsburg, VA, USA
DOI :
10.1109/ULTSYM.1986.198835
