An SOLR calibration for accurate measurement of orthogonal on-wafer DUTs

Orthogonal CPW thrus are notorious for generating undesired modes due to the bend discontinuity. These undesired modes are not accounted for in conventional calibration methods such as SOLT, LRM, and TRL, since they require, by definition, well-behaved thru standards. In this paper, we will demonstrate through experimental results how the Short-Open-Load-Reciprocal thru (SOLR) approach, which avoids imposing any dependency on the nature of the thru standard itself, provides a superior calibration.