Title :
2E-4 Temperature Compensation Method of phi 1mm Ball SAW Gas Sensor Using Harmonics
Author :
Sim, Dongyoun ; Bryan, Maxey ; Takeda, Nobuo ; Nakaso, Noritaka ; Iwata, Naoya ; Tsuji, Toshihiro ; Yamanaka, Kazushi
Author_Institution :
Ball Semicond. Inc., Allen
Abstract :
Newly designed phi 1 mm ball SAW device with a double electrode IDT has a fundamental frequency of 80[MHz], third and fifth harmonics. A difference of the delay time between the fundamental frequency component and a higher harmonic was used to compensate the temperature drift. A temperature coefficient of about 1[ppm/degC ] was obtained after compensation.
Keywords :
acoustic wave propagation; error compensation; gas sensors; interdigital transducers; surface acoustic wave sensors; ultrasonic transducers; SAW gas sensor; delay time; double electrode IDT; frequency 80 MHz; fundamental frequency component; surface acoustic wave devices; temperature compensation method; temperature drift; Collimators; Electrodes; Frequency; Gas detectors; Harmonic analysis; Power harmonic filters; Surface acoustic wave devices; Surface acoustic waves; Temperature sensors; Virtual reality;
Conference_Titel :
Ultrasonics Symposium, 2007. IEEE
Conference_Location :
New York, NY
Print_ISBN :
978-1-4244-1384-3
Electronic_ISBN :
1051-0117
DOI :
10.1109/ULTSYM.2007.32
