Micromachined 40 GHz post-supported patch array using thick SU8 photoresist

Author

Wendong Liu ; Han Wang ; Zhijun Zhang ; Zhenghe Feng

Author_Institution

Dept. of Electron. Eng., Tsinghua Nat. Lab. for Inf. Sci. & Technol., Beijing, China

fYear

2014

fDate

6-11 July 2014

Firstpage

1083

Lastpage

1084

Abstract

A 40-GHz coplanar waveguide (CPW)-fed post-supported patch antenna is presented using a modified fabricating method. The radiating patch is based on a quartz glass (SiO₂) and the CPW feed line is based on silicon (Si) substrate. The post is constructed by SU8 photoresist with the thickness of 250 μm. Flip-chip method is used for the connection of the two parts. Compared to traditional designs, most of the complex CPW feed line network on Si substrate is replaced by the microstrip line based on SiO₂ in the proposed structure, which reduces the losses caused by the Si substrate used in CMOS technology. Preliminary measurement on return loss and radiation pattern is presented.

Keywords

CMOS integrated circuits; antenna radiation patterns; coplanar waveguides; flip-chip devices; micromachining; microstrip antenna arrays; millimetre wave antenna arrays; photoresists; silicon; silicon compounds; CMOS; CPW feed line; SU8 photoresist; SiO₂; coplanar waveguide; flip-chip method; frequency 40 GHz; micromachined post-supported patch array; microstrip line; quartz glass; radiation pattern; return loss; size 250 mum; Arrays; Coplanar waveguides; Feeds; Loss measurement; Patch antennas; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Antennas and Propagation Society International Symposium (APSURSI), 2014 IEEE

Conference_Location

Memphis, TN

ISSN

1522-3965

Print_ISBN

978-1-4799-3538-3

Type

conf

DOI

10.1109/APS.2014.6904868

Filename

6904868