DocumentCode
2470066
Title
Lithium Tetraborate (Li2 B4 O7 ) SAW Resonators
Author
Abe, H. ; Saito, H. ; Ohmura, M. ; Yamada, T. ; Miw, K.
fYear
1987
fDate
14-16 Oct. 1987
Firstpage
91
Lastpage
94
Keywords
Crystals; Fabrication; Frequency estimation; Lithium; Lithography; Resists; Resonance; Resonant frequency; Resonator filters; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE 1987 Ultrasonics Symposium
Conference_Location
Denver, Colorado, USA
Type
conf
DOI
10.1109/ULTSYM.1987.198933
Filename
1535873
Link To Document