Oxidation of III-V semiconductors for novel optoelectronic applications

Author

Blum, O. ; Sutlivan, C. ; Raymond, T.D. ; Alford, W.J. ; Smith, A.V. ; Reno, J.

Author_Institution

Sandia Nat. Labs., Albuquerque, NM, USA

Volume

2

fYear

1998

fDate

3-4 Dec 1998

Firstpage

34

Abstract

Summary form only given. We discuss the use of oxides in semiconductor optical waveguides and the challenges associated with design, growth and fabrication of such waveguides. We show a cross sectional scanning electron microscope view of a partially oxidized waveguide, and we show modal losses of various width waveguides for fully oxidized, partially oxidized and unoxidized cases. Applications to PIC technology, nonlinear wave mixing in oxide/semiconductor waveguides and edge emitting lasers will be discussed

Keywords

III-V semiconductors; optical design techniques; optical fabrication; optical planar waveguides; scanning electron microscopy; semiconductor growth; III-V semiconductors; PIC technology; edge emitting lasers; fully oxidized; nonlinear wave mixing; optical waveguide design; optical waveguide fabrication; optical waveguides; optoelectronic applications; partially oxidized; Electron optics; III-V semiconductor materials; Integrated optics; Nonlinear optics; Optical design; Optical mixing; Optical waveguide components; Optical waveguides; Oxidation; Semiconductor waveguides;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society Annual Meeting, 1998. LEOS '98. IEEE

Conference_Location

Orlando, FL

Print_ISBN

0-7803-4947-4

Type

conf

DOI

10.1109/LEOS.1998.739447

Filename

739447