Time-Varying Angular Rate Sensing for a MEMS Z-Axis Gyroscope

Author

Salah, Mohamed ; McIntyre, Michael ; Dawson, Daniel ; Wagner, Jens

Author_Institution

Dept. of Electr. & Comput. Eng., Clemson Univ., SC

fYear

2006

fDate

13-15 Dec. 2006

Firstpage

2165

Lastpage

2170

Abstract

In this paper, both axes of a z-axis MEMS gyroscope are actively controlled to facilitate time-varying angular rate sensing. An off-line adaptive least-squares estimation strategy is first developed that accurately estimates the unknown model parameters. An estimation analysis is presented which proves that the model parameters are accurately estimated. An online active controller/observer is then developed for time-varying angular rate sensing. For this method, a nonlinear estimator is developed based on a Lyapunov-based analysis, which proves that the time-varying angular rate experienced by the device can be estimated accurately

Keywords

Lyapunov methods; gyroscopes; least squares approximations; micromechanical devices; nonlinear estimation; time-varying systems; Lyapunov-based analysis; MEMS z-axis gyroscope; adaptive least-squares estimation; nonlinear estimator; online active controller; time-varying angular rate sensing; Adaptive control; Contracts; Fabrication; Gyroscopes; Micromechanical devices; Navigation; Parameter estimation; Programmable control; Resonant frequency; Vibration measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Decision and Control, 2006 45th IEEE Conference on

Conference_Location

San Diego, CA

Print_ISBN

1-4244-0171-2

Type

conf

DOI

10.1109/CDC.2006.377056

Filename

4177371