DocumentCode :
2470812
Title :
Thin Film Induced Effects on SAW Devices
Author :
Sinha, Bikash K. ; Locke, Stanley
fYear :
1987
fDate :
14-16 Oct. 1987
Firstpage :
289
Lastpage :
294
Keywords :
Bonding; Fingers; Frequency estimation; Glass; Resonant frequency; Substrates; Surface acoustic wave devices; Thermal expansion; Thermal stresses; Thin film devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE 1987 Ultrasonics Symposium
Conference_Location :
Denver, Colorado, USA
Type :
conf
DOI :
10.1109/ULTSYM.1987.198971
Filename :
1535911
Link To Document :
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