Title :
Thin Film Induced Effects on SAW Devices
Author :
Sinha, Bikash K. ; Locke, Stanley
Keywords :
Bonding; Fingers; Frequency estimation; Glass; Resonant frequency; Substrates; Surface acoustic wave devices; Thermal expansion; Thermal stresses; Thin film devices;
Conference_Titel :
IEEE 1987 Ultrasonics Symposium
Conference_Location :
Denver, Colorado, USA
DOI :
10.1109/ULTSYM.1987.198971