Title :
Elastic Constants of Sputtered ZnO Films
Author :
Carlotti, G. ; Socino, G. ; Petri, A. ; Verona, E.
Keywords :
Acoustic measurements; Acoustic propagation; Brillouin scattering; Magnetoelasticity; Phase measurement; Radio frequency; Semiconductor films; Substrates; Velocity measurement; Zinc oxide;
Conference_Titel :
IEEE 1987 Ultrasonics Symposium
Conference_Location :
Denver, Colorado, USA
DOI :
10.1109/ULTSYM.1987.198972