Title :
Sulfuric acid corrosion of ITO surface for improvement of the optical properties
Author :
Xu, Xinwei ; Cui, Bifeng ; Guo, Weiling ; Zhu, Yanxu ; Cui, Desheng
Author_Institution :
Key Lab. of Opto-Electron. Technol., Beijing Univ. of Technol., Beijing, China
Abstract :
After the surface treatment with concentrate sulfuric acid, the sheet resistance of ITO layer is unchanged, while the surface roughness increased. When the 70-100nm ITO layer is eroded by the concentrate sulfuric acid for 480 seconds, its reflectivity decreased and the transmittance significantly increased. It can improve the optical properties of the LED devices.
Keywords :
corrosion; electric resistance; indium compounds; light emitting diodes; reflectivity; semiconductor materials; surface roughness; surface treatment; tin compounds; ITO; ITO layer; ITO surface; LED devices; concentrate sulfuric acid; erosion; optical properties; reflectivity; sheet resistance; size 70 nm to 100 nm; sulfuric acid corrosion; surface roughness; surface treatment; time 480 s; transmittance; Corrosion; Films; Indium tin oxide; Light emitting diodes; Optical reflection; Rough surfaces; Surface morphology; ITO; corrosion; optical properties; sulfuric acid;
Conference_Titel :
Remote Sensing, Environment and Transportation Engineering (RSETE), 2011 International Conference on
Conference_Location :
Nanjing
Print_ISBN :
978-1-4244-9172-8
DOI :
10.1109/RSETE.2011.5965820
