DocumentCode :
2471013
Title :
A 400MHz One-Chip Oscillator Using an Air-Gap Type Thin Film Resonator
Author :
Satoh, Hiroaki ; Suzuki, Hitoshi ; Takahashi, Chikau ; Narahara, Chouji ; Ebata, Yasuo
fYear :
1987
fDate :
14-16 Oct. 1987
Firstpage :
363
Lastpage :
368
Keywords :
Air gaps; Dielectric thin films; Fabrication; Oscillators; Passivation; Piezoelectric films; Semiconductor films; Thin film circuits; Thin film devices; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE 1987 Ultrasonics Symposium
Conference_Location :
Denver, Colorado, USA
Type :
conf
DOI :
10.1109/ULTSYM.1987.198984
Filename :
1535924
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2471013
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