Advances in Structure and Fabrication Process for Thin Film Acoustic Resonator

Author

Miyasaka, Yoichi ; Hoshino, Shigeki ; Takahashi, Sadayuki

fYear

1987

fDate

14-16 Oct. 1987

Firstpage

385

Lastpage

394

Keywords

Biomembranes; Etching; Fabrication; Piezoelectric films; Resonance; Rough surfaces; Substrates; Temperature; Transistors; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

IEEE 1987 Ultrasonics Symposium

Conference_Location

Denver, Colorado, USA

Type

DOI

10.1109/ULTSYM.1987.198988

Filename

1535928

Link To Document